Strasbaugh Machine Description
Version 1.2 - April 18, 1996 3 - 9
PNEUMATIC/FLUID SYSTEM
OVERVIEW
The machine requires clean dry air, vacuum, deionized (DI) water
and tap water for all pneumatic/fluid functions.
Clean dry air is connected to the air supply connection on the back
of the machine. A ball valve provides for shutting off air to the
machine. The 5 micron filter removes large contaminants and
moisture from the air followed by a regulator for supply pressure
regulation if the supply pressure exceeds the machine pressure
requirement. A coalescing filter removes small oil and aerosol
particulates from the air. This air is then distributed to the
pneumatic valve panel and the two filter assemblies.
Each air bearing spindle requires clean dry air for proper operation
and long life. A 5 micron filter/coalescing filter pair is connected to
the supply line for each air bearing spindle. No connections are
made between the bearing filter assembly and the spindle (except
a safety pressure switch) so that no contaminants may reach the
bearing. (See Note 1, in the “Facilities Requirements” section of
the Installation chapter of this manual.)
It is important that the filters be checked regularly to maintain
sufficient air pressure and cleanliness. Pressure gauges are
connected after each filter stage to provide indication of filter
performance and condition.
Fifteen clean dry air valves (fourteen on earlier models) are
mounted on the pneumatic valve panel. These valves control the
automatic lubricator, air cylinders, and wafer blowoffs on the
machine. All valves are 24 VDC solenoid actuated four-way valves
mounted on two adjacent manifolds. Valves 1 through 10
(designated SOL1-SOL10) are mounted on the lubricated air
manifold. The clean dry air supplying this manifold flows through
the oil mist lubricator mounted on the panel. The lubricator
produces an oil mist in the clean dry air to lubricate the valves and
cylinders.
The four blowoff valves (SOL11-SOL14) are supplied by the dry air
to prevent oil contamination on the wafers.
All pneumatic valves have a manual override function to manually
actuate the valve for troubleshooting.
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