Operation and Maintenance Manual Model 7AA Wafer Grinder
3 - 10 Version 1.2 - April 18, 1996
Vacuum is connected from the rear of the machine to the
pneumatic panel. A gauge on the operator panel indicates the
vacuum level at the supply connection. Six vacuum valves
(designated SOL15-SOL20) control the vacuum functions on the
machine. Each vacuum valve is an air piloted 24 VDC solenoid
operated diaphragm valve. Vacuum valves cycle vacuum on each
chuck to secure the wafer for rotation or pick and place transfer.
DI water is used to rinse the wafer on the work chuck and to cool
the wafer and grinding wheels while grinding. Water flow is
controlled by three 110 VAC solenoid operated poppet valves.
Water flow for each valve is controlled by a plastic needle valve
located just below the drain pan. A flow switch in the DI water line
is used to check water flow while any of the three water valves are
open.
The rinse/spin station cleans the wafer with high pressure D.I.
water. The water pressure is adjustable from 0-3000 PSI by
adjusting the inlet air pressure to the pump on the back of the
machine.
The city water connection provides cooling water for the induction
motor on the grind spindle. The water flows through a cooling
jacket surrounding the motor housing and flows out the machine
drain. The motor requires 0.25 gallons per minute of flow. A flow
switch in the line provides a continuous indication of cooling water
flow.
To Next Page
Loading...