Strasbaugh 7AA - Control System Overview Power Distribution Servo Control Loop

Operation and Maintenance Manual Model 7AA Wafer Grinder
3 - 2 Version 1.2 - April 18, 1996
CONTROL SYSTEM OVERVIEW 3
POWER DISTRIBUTION 3
SERVO CONTROL LOOP 4
24 VDC INPUTS 4
24 VDC OUTPUTS 5
AC OUTPUTS 5
CRT VIDEO 6
MECHANICAL OVERVIEW 7
GRIND ASSEMBLY BED 7
WORK SPINDLE CARRIAGE 7
GRIND SPINDLE SUPPORT 7
GRIND SPINDLE FEED MECHANISM 8
PNEUMATIC/FLUID SYSTEM OVERVIEW 9