Strasbaugh Machine Setup
Version 1.2 - April 18, 1996 5 - 3
MACHINE SETUP
MACHINE PARAMETER ENTRY
The machine parameter mode is used to define certain parameters
characteristic to specific machines and processes. These
parameters usually must be determined empirically under actual
process conditions.
The accuracy of the machine parameter data is essential to
establishing and maintaining optimum machine performance.
To display the machine operation menu, press the reset key. Turn
the key switch to "PROG" and press the "7" key. This will display
the machine parameters menu. Machine parameters require
seven pieces of data. All data is stored in nonvolatile memory and
will be retained until changed by the operator.
To enter data, press the key corresponding to the line number for
that parameter. A > symbol will be displayed next to the data for
the parameter to be changed. The following display will appear in
the lower right hand corner of the screen
data entry [ +0]
Enter the new data and verify that the number in brackets is
correct. Press "ENT." The new data should now be displayed next
to the corresponding parameter. If data is incorrect, repeat the
above procedure using the correct data. The necessary data is
explained below:
1) Coarse wear correction - enter the thickness in microns to
compensate for coarse wheel wear. The computer will
compensate the coarse grind wheel by this amount each
time an accumulated thickness equal to the coarse wear
limit is reached.
2) Coarse wear limit - enter the accumulated thickness in
microns to prompt coarse wheel wear correction by the
computer, this compensation is made after cumulative
stock removal for wafers ground equals or exceeds the
coarse wear limit.
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