Strasbaugh Mechanical Maintenance Procedures
Version 1.2 - April 18, 1996 7 - 25
ELEVATOR CALIBRATION
This section is intended to provide an explanation of the wafer
elevator operation and the necessary adjustments for elevator
maintenance. The three critical functions for each elevator are
1) cassette in place sensing, 2) wafer in slot sensing, and 3)
determining wafer slot location. Each machine requires four
elevators; all elevators are similar in operation. For elevator
assembly detail refer to engineering drawing ACC2 01R in the
drawing section of this manual.
CASSETTE IN PLACE
The sensing mechanism for cassette in place consists of a pair
of plastic optical fibers and a fiber optic amplifier. The fibers
are used in opposed mode sensing where one fiber emits
modulated light. The opposed fiber detects the light beam to
provide an input to the programmable control. The h-bar on the
bottom of wafer cassettes breaks the beam to indicate a
cassette in place. There are essentially no adjustments for this
function. The gain adjustment on the amplifier should be fully
clockwise for maximum signal intensity. An led on the amplifier
indicates light beam sensing through the fibers.
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