Strasbaugh Troubleshooting
Version 1.2 - April 18, 1996 10 - 5
ERROR CONDITIONS AND
MESSAGES
When a machine error condition exists, a message will be
displayed on the screen. These error conditions are defined
below:
AXIS REFERENCE ERROR Axes have not been properly
referenced.
To clear, initialize machine.
AXIS LIMIT ERROR One or both axes have exceeded
travel limit. To clear, manually jog
appropriate axis off limit switch.
P & P MOVE ERROR Pick and place malfunction.
To clear enter "Manual Jog Mode"
and move pick and place CW or
CCW.
P & P #1 VACUUM ERROR Insufficient vacuum on pick and
place #1 chuck. To clear, halt cycle,
push "RESET" to release wafer.
Inspect for chips or breaks. Restart
cycle
P & P #2 VACUUM ERROR Insufficient vacuum on pick and
place #2 chuck. To clear, halt cycle,
push "RESET" to release wafer.
Inspect for chips or breaks. Restart
cycle
P & P #3 VACUUM ERROR Insufficient vacuum on pick and
place #3 chuck. To clear, halt cycle,
push "RESET" to release wafer.
Inspect for chips or breaks. Restart
cycle
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