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Strasbaugh 7AA - User Manual

Strasbaugh 7AA
283 pages
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Version 1.2 - April 18, 1996
Model 7AA
Wafer Grinder
Operation
and
Maintenance
Manual
S T R A S B A U G H
825 Buckley Road
San Luis Obispo, CA 93401
Phone: (805) 541-6424
Fax: (805) 541-6425

Table of Contents

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Summary

Introduction

About the 7 AA Manual

Provides information about the 7AA manual and related resources.

About the Model 7 AA Wafer Grinder

Describes the Model 7AA Wafer Grinder's design and capabilities.

Guarantee;Warranty Certificate

Details the guarantee and warranty information for the product.

Safety

General Operation

Outlines essential safety instructions for operating the machine.

Visual Hazard Alerts

Explains the system of visual hazard alert graphics used.

Three-Panel Alert Graphics

Details the structure and purpose of three-panel alert graphics.

Interlocks - Safety Interlock Door Switches

Explains the function of safety interlock door switches.

Sprayer Use, Slurry Compounds, and Waste Disposal

Provides guidance on safe sprayer use, slurry compounds, and waste disposal.

Lockout Safety Procedure

Defines the procedure for controlling hazardous energy.

Appendix to Lockout Safety Procedure: Training, Lockout;Tagout, Per 29 CFR 1910.147

Details training requirements for lockout/tagout procedures.

Gallium Arsenide and Germanium Use

Provides safety information for handling Gallium Arsenide and Germanium.

Material Safety Data Sheets for Products Used in Machine Maintenance

Lists Material Safety Data Sheets for maintenance products.

Installation

Receiving

Details procedures for inspecting the machine upon delivery.

Location

Specifies requirements for machine placement and clearance.

Leveling

Explains the process for leveling the machine.

Facilities Requirements

Lists required facility connections and utilities.

Machine Description

Control System Overview

Provides a general description of the electrical control system.

Mechanical Overview

Describes the fundamental principles of the machine's mechanics.

Pneumatic;Fluid System Overview

Explains the pneumatic and fluid systems of the machine.

Operator Functions

Machine Operation Description

Details the machine's operational sequence and functions.

Wafer Transport System

Explains the operation of the wafer transport system.

Control Panel

Describes the indicators, displays, and controls on the machine's panel.

CRT Display Menus

Lists and explains the CRT display menus for control parameters.

Basic Operation

Provides a summary of startup and automatic grind cycle procedures.

Machine Setup

Machine Parameter Entry

Defines parameters characteristic to specific machines and processes.

Adjust R.P.M.s

Explains how to adjust motor speeds (RPMs).

Preventive Maintenance Schedules

Daily Preventive Maintenance

Outlines daily tasks for machine maintenance.

Weekly Preventive Maintenance Schedule

Details weekly tasks for machine maintenance.

Monthly Preventive Maintenance Schedule

Specifies monthly tasks for machine maintenance.

Mechanical Maintenance Procedures

Manual Control of Machine

Provides manual operator control for servo axes and pick/place rotation.

Grind Operation Procedures

Describes adjustments, calibration, and compensation for grinding.

Elevator Calibration

Explains wafer elevator operation and adjustments.

Lubrication

Details machine lubrication requirements and methods.

Software Calibration Procedures

Machine Diagnostics

Provides evaluation of program lines in real-time for troubleshooting.

Offline Storage Support Utilities

Details utilities for managing data offline.

Control Variables and Contacts

Lists variables and contacts used for troubleshooting and calibration.

Pneumatic Adjustments

Pneumatic Regulator Adjustment

Defines the location, function, and operating level of pneumatic regulators.

Speed Controls

Explains pneumatic speed controls for cylinder rod speed.

Air Bearing Spindle Maintenance

Details maintenance practices for air bearing spindles.

Vacuum Switch Adjustment

Explains vacuum switch adjustment for wafer transfer.

D.I. Water Flow Valves

Describes PVC needle valves for adjusting D.I. water flow.

Cooling Water Flow Valve

Explains the brass globe valve for cooling water flow.

Troubleshooting

Frequently Encountered Problem Conditions

Lists possible machine operation anomalies and their causes.

Error Conditions and Messages

Defines error conditions and associated messages displayed on the screen.

Error Condition Lights

Explains the machine's error condition lights and their meanings.

Servo Error Codes

Details servo error codes and their causes.

Appendices

Engineering Drawings

Provides engineering drawings for the machine.

Part Lists

Lists all parts used in the machine assemblies.

Manufacturers Documentation Sheets

Refers to manufacturer documentation for additional details.

Strasbaugh 7AA Specifications

General IconGeneral
BrandStrasbaugh
Model7AA
CategoryGrinder
LanguageEnglish