Strasbaugh 7AA - Machine Operation Description; Overview - Machine Cycle Sequence with Wafer Transport System; Wafer Transport System; Machine Cycle Sequence Without Wafer Transport System

Operation and Maintenance Manual Model 7AA Wafer Grinder
4 - 2 Version 1.2 - April 18, 1996
MACHINE OPERATION DESCRIPTION 3
OVERVIEW - MACHINE CYCLE SEQUENCE WITH WAFER TRANSPORT
SYSTEM 3
WAFER TRANSPORT SYSTEM 5
MACHINE CYCLE SEQUENCE WITHOUT WAFER TRANSPORT SYSTEM 8
CONTROL PANEL 9
CRT DISPLAY MENUS 10
SPECIAL KEY FUNCTIONS 11
BASIC OPERATION 13
SUMMARY 13
STEP 1 - MACHINE POWER UP 14
STEP 2 - MACHINE INITIALIZATION 15
STEP 3 - GRIND PARAMETER ENTRY 17
STEP 4 - GRIND MODE SELECTION 22
STEP 5 - PLACE CASSETTES ON ELEVATORS 23
STEP 6 - START MACHINE AUTO CYCLE 24