Operation and Maintenance Manual Model 7AA Wafer Grinder
6 - 6 Version 1.2 - April 18, 1996
MONTHLY PREVENTIVE
MAINTENANCE SCHEDULE
Date: ________________
Machine Number: ________________
Fab Number: ________________
Tech. Initials
1. Complete daily P.M. _______
2. Complete weekly P.M. _______
3. Check cooling holes: coarse wheel_______ _______
fine wheel _______ _______
4. Clean drain pan: drain pan ________
drain hole ________
splash guard ________
door panel ________
5. Check RPM settings: Read Adjusted to
coarse wheel ____ _________
fine wheel ____ _________
work chuck grind ____ _________
work chuck rinse ____ _________
spin chuck rinse ____ _________
spin chuck dry ____ _________
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