Strasbaugh Preventive Maintenance Schedules
Version 1.2 - April 18, 1996 6 - 5
12.Measure diamond depths of wheel: _______
fine wheel _______ coarse wheel _______
fine wheel replaced? yes ____ no____
coarse wheel replaced? yes ____ no____
13. Adjust spin chuck brush or water pressure. _______
14.Adjust work chuck brush or water pressure. _______
15. Clean pick and place chucks. _______
16. Initialize machine and grind 6 monitor wafers. _______
17. Check pick and place operation:
a. screws are tight
b. hoses clear
c. clips secure
d. smooth operation
e. centering good _______
18. Record actual and offset spindle heights. _______
coarse actual _________ fine actual _________
coarse offset _________ fine offset _________
difference _________ difference _________
NOTE: Correct problem if difference is > 20 microns.
19. Ensure P.M. checklist and logbook are filled
out properly. _______
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