Operation and Maintenance Manual Model 7AA Wafer Grinder
1 - 22 U Version 1.2 - April 18, 1996; Update 11/6/96
GALLIUM ARSENIDE AND
GERMANIUM USE
The information below is applicable only to owners of Strasbaugh
machines using gallium arsenide or germanium in their processes.
NOTICE: Material safety data sheets (MSDS) for gallium arsenide
and germanium are to be provided by the supplier of the
wafers/wafer crystals.
GALLIUM ARSENIDE (GAAS)
Gallium arsenide is used in the semiconductor industry in the form of
polished wafers with a dark gray metallic sheen.
“Gallium arsenide technology (GaAs) III-V binary compound possesses
good electrical properties, making this material highly attractive for
electronic applications. In addition, GaAs possesses good and unique
optoelectronic properties because it can be prepared in a semi-
insulating state or behavior.”
- Electronic Materials Handbook, ASM International,Vol. 1, pp. 199.
Health Warning
Arsenic is a neurotoxin and a suspected skin and lung carcinogen.
Poisoning may affect the heart, gastrointestinal system, kidneys, and
liver. Its NFPA Rating for Health is 2 on a scale of 0 - 4.
Ingestion
If ingestion occurs, obtain immediate medical attention. The following
effects may result: vomiting, diarrhea, nausea, gastrointestinal
disturbances, metallic taste in mouth, depression of bone marrow
function, and/or nerve damage.
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