Operation and Maintenance Manual Model 7AA Wafer Grinder
9 - 4 Version 1.2 - April 18, 1996
PNEUMATIC REGULATOR
ADJUSTMENT
Several pneumatic regulators are located on the machine. This
section defines the location, function, and recommended operating
level for these regulators.
As mentioned above the incoming pressure regulator is located
between the primary 5 micron filter and coalescing filter. Assuming
a maximum 10 PSI pressure drop across the coalescing filter and
each air bearing filter pair, this regulated pressure should be 90
PSI minimum. If supply pressure does not exceed 100 PSI turn the
regulator adjustment fully clockwise (viewed from below) to
maximize the regulated pressure.
The regulator for the lubricated air valve manifold is located on the
lubricator outlet port. This provides a stable supply pressure for
the air valves. Typical operating pressure is 50-60 PSI.
Newer model machines are equipped with several integral
regulators mounted between the valve body and manifold. These
regulators control the operating pressure for the individual valve.
The regulators are input regulators, that is, they regulate the supply
pressure for the valve supply port.
The pick and place clockwise regulator (SOL6) typical operating
pressure is 50-60 PSI. A gauge on the gauge manifold above the
valve manifold indicates the regulator setting.
Regulators on valves 7-9 (SOL7-SOL9) regulate the up and down
pressure for moving pick and place 1, 2 and 3, respectively.
Typical operating pressure is 10-30 PSI.
Regulators on valves 10-14 (SOL11-SOL14) regulate the blowoff
pressure for pick and place 1, 2 and 3 and the spin chuck,
respectively. Typical operating pressure is 10-20 PSI.
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