Operation and Maintenance Manual Model 7AA Wafer Grinder
10 - 6 Version 1.2 - April 18, 1996
R/S VACUUM ERROR Insufficient vacuum on rinse/spin
chuck.To clear, halt cycle, push
"RESET" to release wafer. Inspect
for chips or breaks. Restart cycle.
SEND WAFER ERROR Wafer did not reach position at pick-
up station or pick-up chuck vacuum
is low. To clear, halt cycle, push
"RESET", remove any wafers from
pick-up station.
FORCE GRINDING Feed rate exceeds maximum stock
removal rate of grind wheel. To
correct, reduce appropriate feed
rate. In manual mode, this message
indicates that grinding wheel is
resting on work chuck.
REPLACE RECEIVE BOATS No available receive cassettes on
receive elevators. To clear, install or
replace receive cassettes.
SPINDLE MOTOR TRIPPED Grind spindle motor overload circuit
tripped. To clear, cycle machine
power and perform initialization and
calibration.
CHECK UTILITIES One or more utilities dropped below
minimum safe operating level. To
clear, halt cycle. If auto cycle active,
press "RESET", turn key switch to
"AUTO", press "1" to display start-up
check list. Any utilities errors will be
identified by two flashing question
marks (??). To clear, correct utilities
error.
To Next Page
Loading...