Strasbaugh Mechanical Maintenance Procedures
Version 1.2 - April 18, 1996 7 - 27
To adjust wafer sensor sensitivity for send elevators load a
cassette with wafers in every other slot. As the wafers are
unloaded from the cassette the sensor should be adjusted to
the point where the platform stops at each occupied slot but
does not stop at unoccupied slots. This indicates correct
sensitivity adjustment.
For receive elevators an empty cassette should be used. As
wafers are loaded into the cassette the sensor should be
adjusted so that the sensor senses each wafer as it reaches the
sensor but no longer senses the wafer once the cassette is
raised to the next slot. If the sensitivity is set too low the
cassette will not raise when the wafer reaches the sensor; if set
too high the elevator will skip slots when raising.
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