Operation and Maintenance Manual Model 7AA Wafer Grinder
8 - 2 Version 1.2 - April 18, 1996
MACHINE DIAGNOSTICS 4
OFFLINE STORAGE SUPPORT UTILITIES 5
INSTALLATION 5
OPERATING INSTRUCTIONS 5
TRANSFER GRIND PARAMETERS FROM MACHINE TO DISK 'F1' 5
TRANSFER GRIND PARAMETERS FROM DISK TO MACHINE 'F2' 6
EDIT/CREATE SINGLE GRIND PARAMETERS 'F3' 6
EDIT/CREATE DUAL GRIND PARAMETERS 'F4' 7
DIRECTORY OF GRIND PARAMETERS 'F5' 7
DIRECTORY OF WAFER DATA FILES 'F6' 7
ACTIVE I/O STATUS UPDATE 'F7' 8
WAFER CAPTURING UTILITIES 'F8' 8
TERMINAL MODE 'F9' 9
EXIT TO DOS 'F10' 9
ERROR MESSAGES 9
PASSWORD AND I.D. NUMBERS 9
CONTROL VARIABLES AND CONTACTS 10
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