Operation and Maintenance Manual Model 7AA Wafer Grinder
1 - 2 U Version 1.2 - April 18, 1996; Update 11/6/96
ABOUT THE 7AA MANUAL 3
ABOUT THE MODEL 7AA WAFER GRINDER 4
GUARANTEE/WARRANTY CERTIFICATE 5
SAFETY 7
General Operation 8
Visual Hazard Alerts 10
Hazard Magnitude Levels 10
Three-Panel Alert Graphics 11
Interlocks - Safety Interlock Door Switches 15
Sprayer Use 16
Slurry Compounds 16
Waste Disposal 16
Lockout Safety Procedure 17
Lockout Procedure 18
Appendix To Lockout Safety Procedure: 20
Training, Lockout/Tagout, per 29 CFR 1910.147 20
Gallium Arsenide And Germanium Use 22
Gallium Arsenide (GaAs) 22
Germanium (Ge) 26
Material Safety Data Sheets For Products Used In Machine Maintenance 30
Shell Tellus (R) Oil 10
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