xxfsassy.p c+ 15.3.9 Field Service Assy BOM Date: 04/04/00
Page: 11 Strasbaugh Time: 13:12:45
Parent: 117789 7AA ACC-11 HIGH PRESSURE WAFER CLEANING
Drawing: Rev:
Type: ASSY-SUB Group: 500
Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff
------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- --------
101573 1.00 FT HOSE,FLEXADUX 4" TYPE R2 RM-T&W
106675 4.00 EA MOUNT,RUBBER STUD BUMP R CS-ELEC
107024 1.00 EA PUMP,29723-36-C HASKEL **SEE TEXT CS-ELEC
110729 1.00 EA GAUGE,5.500-3000 NOSHOK CS-MECH
110732 1.00 EA HOSE,SS-TH4-TA4-TA4-98 CAJON RM-T&W
110733 2.00 EA HOSE,SS-4BHT-12 CAJON RM-T&W
111893 1.00 EA FTG,SS,ELB,1/4TBG,3/8MNP T> CS-FTG
111916 5.00 EA FTG,SS,CONN,1/4TBG, 1/4MNPT,SW CS-FTG N/A
111917 1.00 EA FTG,SS,ELB,1/4TBG, 1/4MNPT,SW CS-FTG
115269 1.00 EA NOZ,11430-1/4SS-200 CS-MECH
115270 1.00 EA SOLID STREAM TIP- SPRAY. CS-MISC
117810 1.00 EA 7AA,WELDMENT,PLENUM FAB-WELD 7AA-117810D1-W1 >
199156 1.00 EA 7AA,POST FAB-MACH 7AA-A11-02
199157 1.00 EA 7AA,SPRAY ARM FAB-MACH 7AA-A11-01
199160 1.00 EA 7AA,PLENUM SHIELD FAB-SHMT 7AA-199160D1
199163 2.00 EA 7AA,BAFFLE FAB-SHMT 7AA-199163D1
199178 1.00 EA 7AA,CLAMP SCREW FAB-MACH 7AA-A11-03