xxfsassy.p c+ 15.3.9 Field Service Assy BOM Date: 04/04/00
Page: 38 Strasbaugh Time: 13:12:56
Parent: 118336 MODEL 7AA AUTOMATIC WAFER BACK GRIND
Drawing: 7AA-118336E1... > Rev: H
Type: ASSY-FG Group: 500
Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff
------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- --------
115161 1.00 EA LUBE SYS ELBOW A2768 BIJ R CS-MISC N/A 07/25/96
115163 17.00 EA LUBE SYS SLEEVE,B-1061 CS-MISC N/A 04/10/96
115168 11.00 EA NUT,LUBE,SYS.,B-1095,BIJ UR CS-MISC N/A 07/25/96
115170 10.00 EA LUBE SYS BUSHING,B-1371 CS-MISC N/A 07/25/96
115177 2.00 EA LUBE SYS JUNCTION,B-3065 CS-MISC N/A 03/19/96
115190 1.00 EA LUBE METER UNIT,FSA-3/ B-6526 CS-MISC 04/10/96
117780 4.00 EA 7AA,ASSY,ACC-2 ELEVATORS ASSY-SUB 7AA-117780A1,A2
117784 1.00 EA 7AA,ASSY,ACC-6 CHUCK BRUSH ASSY-SUB 7AA-A6
170563 1.00 EA 7AA,COOLANT MANIFOLD FAB-MACH 7AA-146 946 08/23/96
170689 1.00 EA 7AA,SHIPPING BRACKET FAB-SHMT 7AA-228
170690 1.00 EA 7AA,SHIPPING BRACKET FAB-SHMT 7AA-242
170691 1.00 EA 7AA,SHIPPING BRACKET FAB-SHMT 7AA-243
171106 1.00 EA 7AA,ASSY,GRIND CHAMBER HOOD ASSY-SUB 7AA-171106A1
172260 4.00 EA LATCH,FLUSH,62-40-211- CS-MECH 01/17/97
172261 1.00 EA LATCH,FLUSH,62-40-311- CS-MECH 01/17/97
172262 1.00 EA LATCH,FLUSH,62-42-211- CS-MECH 01/17/97
198961 1.00 EA 7AA,SHIELD FAB-MISC 7AA-A8-02
198962 1.00 EA 7AA,SHIELD FAB-MISC 7AA-A8-03
198964 1.00 EA 7AA,SHIELD FAB-MACH 7AA-A8-01
198965 1.00 EA 7AA,SHIELD FAB-MISC 7AA-A8-04
198966 1.00 EA 7AA,TERMINAL COVER FAB-MISC 7AA-A8-05
199160 1.00 EA 7AA,PLENUM SHIELD FAB-SHMT 7AA-199160D1
225118 4.00 EA LATCH,LIFT&TURN,BASIC,PO L,MED-GRIP CS-MECH 02/29/96
225119 1.00 EA LATCH,LIFT&TURN,BASIC,PO L,LOW-GRIP CS-MECH 02/29/96
225120 1.00 EA LATCH,LIFT&TURN,LOCK-CCW ,POL,MED-G CS-MECH 02/29/96
225944 1.00 EA 7AA,ASSY,LOWER CABINET ASSY-SUB 7AA-225944A1,A2
225945 1.00 EA 7AA,ASSY,GRIND CHAMBER PAN ASSY-SUB 7AA-225945A1
225946 1.00 EA 7AA,ASSY,UPPER SPINDLE ASSY-SUB 7AA-225946A1
225947 1.00 EA 7AA,ASSY,LOWER GRIND SECTION PA ASSY-SUB 7AA-225947
225948 1.00 EA 7AA,ASSY,ELECTRICAL BOX ASSY-SUB 7AA-225948A1
225955 1.00 EA 7AA,ASSY,BED ASSY-SUB 7AA-225955A1
225956 1.00 EA 7AA,ASSY,OPERATOR'S CONSOLE ASSY-SUB 7AA-225956
225960 1.00 EA 7AA,ASSY,Z-AXIS FEED MECHANISM ASSY-SUB 7AA-225960A1
225961 1.00 EA 7AA,ASSY,ELEVATOR SUPPORT ASSY-SUB 7AA-225961A1,A2
225962 1.00 EA 7AA,ASSY,SPIN STATION ASSY-SUB 7AA-225962
225964 1.00 EA 7AA,ASSY,CENTERING STATION ASSY-SUB 7AA-010
225965 1.00 EA 7AA,ASSY,MEASURING STATION ASSY-SUB 7AA-225965A1
225966 1.00 EA 7AA,ASSY,PICK & PLACE ASSY-SUB 7AA-225966A1
225967 1.00 EA 7AA,ASSY,HANDLING SECTION EN ASSY-SUB 7AA-225967A1
225968 1.00 EA 7AA,ASSY,HOOD ASSY-SUB 7AA-225968A1
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