Operation and Maintenance Manual Model 7AA Wafer Grinder
1 - 24 U Version 1.2 - April 18, 1996; Update 11/6/96
Fire and Explosion Hazards
In the event of a fire, firefighters should use normal procedures which
include wearing NIOSH/MSHA approved self-contained breathing
apparatus. Flame and chemical resistant clothing, hats, boots, and
gloves should also be worn. Do not use water to extinguish the
gallium arsenide. Use dry chemical extinguishing agents, dry sand, or
dry ground dolomite. Remove material from the fire area only if
without risk.
See Section 4 of the gallium arsenide MSDS for additional
information.
Reactivity Warning
Gallium arsenide is incompatible with steam, acids, acid fumes, and
quartz. When gallium arsenide decomposes and/or reacts with
incompatible substances, poisonous arsine gas and hazardous oxides of
gallium and arsenic are produced. Additionally, molten gallium
arsenide attacks quartz.
See Section 6 of the gallium arsenide MSDS for additional
information.
Environmental Information
During wafer processing, the wastewater generated must be monitored-
-it cannot be allowed to flow freely into an open drain. Consult local,
state, or federal EPA regulations for proper disposal. The wastewater
may be collected in compatible 55-gallon drums for waste disposal
through a licensed facility. If available, the wastewater may be piped to
a wastewater treatment plant on-site.
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