Strasbaugh 7AA - Page 4

Operation and Maintenance Manual Model 7AA Wafer Grinder
iv U Version 1.2 - April 18, 1996; Update 11/6/96
Chapter 3 Machine Description 3 - 1
Control System Overview 3
Power Distribution 3
Servo Control Loop 4
24 VDC Inputs 4
24 VDC Outputs 5
AC Outputs 5
CRT Video 6
Mechanical Overview 7
Grind Assembly Bed 7
Work Spindle Carriage 7
Grind Spindle Support 7
Grind Spindle Feed Mechanism 8
Pneumatic/Fluid System Overview 9
Chapter 4 Operator Functions 4 - 1
Machine Operation Description 3
Overview - Machine Cycle Sequence With Wafer Transport System 3
Wafer Transport System 5
Machine Cycle Sequence Without Wafer Transport System 8
Control Panel 9
CRT Display Menus 10
Special Key Functions 11
Basic Operation 13
Summary 13
Step 1 - Machine Power Up 14
Step 2 - Machine Initialization 15
Step 3 - Grind Parameter Entry 17
Step 4 - Grind Mode Selection 22
Step 5 - Place Cassettes On Elevators 23
Step 6 - Start Machine Auto Cycle 24