Operation and Maintenance Manual Model 7AA Wafer Grinder
vi U Version 1.2 - April 18, 1996; Update 11/6/96
Chapter 8 Software Calibration Procedures 8 - 1
Machine Diagnostics 4
Offline Storage Support Utilities 5
Installation 5
Operating Instructions 5
Transfer Grind Parameters From Machine To Disk 'F1' 5
Transfer Grind Parameters From Disk To Machine 'F2' 6
Edit/Create Single Grind Parameters 'F3' 6
Edit/Create Dual Grind Parameters 'F4' 7
Directory Of Grind Parameters 'F5' 7
Directory Of Wafer Data Files 'F6' 7
Active I/O Status Update 'F7' 8
Wafer Capturing Utilities 'F8' 8
Terminal Mode 'F9' 9
Exit To Dos 'F10' 9
Error Messages 9
Password And I.D. Numbers 9
Control Variables And Contacts 10
Chapter 9 Pneumatic Adjustments 9 - 1
Pneumatic Regulator Adjustment 4
Speed Controls 5
Air Bearing Spindle Maintenance 6
Vacuum Switch Adjustment 7
D.I. Water Flow Valves 9
Cooling Water Flow Valve 10
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