Operation and Maintenance Manual Model 7AA Wafer Grinder
7 - 2 Version 1.2 - April 18, 1996
MANUAL CONTROL OF MACHINE 4
GRIND OPERATION PROCEDURES 6
SPINDLE SPEED SETTINGS 6
GRIND WHEEL REPLACEMENT 7
WHEEL TRUING AND DRESSING 8
GRIND WHEEL COOLANT 10
WORK CHUCK REPLACEMENT 11
WORK CHUCK GRINDING 12
CHUCK GRIND MODE 12
PROCEDURE 13
GRIND SPINDLE ALIGNMENT 14
SPINDLE PRETRAVEL ADJUSTMENT 17
DYNAMIC OFFSET 20
WHEEL WEAR COMPENSATION 22
DETERMINING WORK CHUCK POSITION 24
ELEVATOR CALIBRATION 25
CASSETTE IN PLACE 25
WAFER IN SLOT 26
CASSETTE SLOT LOCATION 28
LUBRICATION 30
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