Ulvac GI-M2 - Page 10

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Table. 9-9 Measurement value outputs (GI-M2) .........................................................................49

Table. 9-10 Measurement value outputs ......................................................................................51

Table. 9-11 Measurement value outputs ......................................................................................53

Table. 9-12 Measurement value outputs ......................................................................................55

Table. 10-1 A list of EXT-I/O functions ...........................................................................................59

Table. 13-1 Relative Sensitivity Factor of Ion Gauge for Each Gas with Respect to Nitrogen

and Relative Ionization Cross-Sectional Area ..............................................................81

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