Ulvac GI-M2 - Page 83

77
●
Communication cannot be established.
Possible cause
Corrective action
Cable specifications differ.
RS-232C cables include the straight type and
cross type. Use the cross type for this gauge.
(See page 65.)
Erroneous wiring or broken wire of
cable
Correct the wiring and check continuity using a
circuit tester.
(See page 65.)
Condition setting is not correct.
Check to see if settings, such as baud rate,
parity, data bit, stop bit, etc., are correct. (See
page 65.)
When a terminal
(CR) is not set definitely, a
command is not received.
●
An error is displayed
Possible cause
Corrective action
The filament is broken during DEGAS
［ Ｅｒｒ． １4 ］ is displayed.
Use the other filament.
Pressure is in state that it is higher
than the measurement range.
［ Ｅｒｒ． １３ ］ is displayed.
Remove it in "→( ENTER).
Confirm pressure in other Pirani vacuum gauges.
→Ｐ．24
When pressure is normal, please check a
Sensor
head or a sensor head cable.（Refer to a Precious
section
）
A set point is not appropriate.
［ Ｅｒｒ． １２ ］ is displayed.
Input again a set point after confirmation.
→Ｐ．
25
The filament is broken
［ Ｅｒｒ． １1 ］ is displayed.
Use the other filament.