8-24 Agilent 4155C/4156C User’s Guide Vol.1, Edition 11
Specifications
Functions
Table 8-11 Calculation Example of Measurement Accuracy using HRSMU
Table 8-12 Calculation Example of Measurement Accuracy using MPSMU/HPSMU
Accuracy:
± (% of reading) ± (offset value)
Maximum value is applicable when the following conditions are satisfied.
• Current compliance is smaller than the current range.
• Capacitance of the DUT and measurement path is smaller than the maximum
measurement value.
Current
Range
Integration
Time
Maximum Value
Meas.
Reso.
Accuracy
10 pA/
100 pA
0.5 sec 100 fF/1 pF 5 fF
± (4.2 % + 70 pF)
1 sec 2 pF/20 pF 10 fF
± (4.3 % + 90 pF)
2 sec 76 pF/760 pF 20 fF
± (4.3 % + 130 fF)
1 nA
0.1 sec 700 pF 10 fF
± (0.84 % + 160 fF)
0.5 sec 4.5 nF 40 fF
± (0.85 % + 280 fF)
2 sec 18 nF 200 fF
± (0.93 % + 740 fF)
10 nA
0.1 sec 7 nF 10 fF
± (0.84 % + 200 fF)
0.5 sec 45 nF 40 fF
± (0.85 % + 440 fF)
2 sec 180 nF 200 fF
± (0.93 % + 1.4 pF)
10 sec 940 nF 1 pF
± (1.3 % + 6.2 pF)
Current
Range
Integration
Time
Maximum Value
Meas.
Reso.
Accuracy
1 nA
0.1 sec 700 pF 10 fF
± (0.91 % + 170 fF)
0.5 sec 4.5 nF 40 fF
± (0.94 % + 340 fF)
2 sec 18 nF 200 fF
± (1 % + 1 pF)
10 nA
0.1 sec 7 nF 10 fF
± (0.91 % + 180 fF)
0.5 sec 45 nF 40 fF
± (0.94 % + 480 fF)
2 sec 180 nF 200 fF
± (1 % + 1.6 pF)
10 sec 940 nF 1 pF
± (1.6 % + 7.6 pF)