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Agilent Technologies 5530 - Page 120

Agilent Technologies 5530
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Chapter 8 Ensuring Repeatability, Accuracy, and Resolution
Ensuring Accuracy
8-8 Getting Started Guide
8
Figure 8-4. Example of cosine error
To minimize cosine error, follow these guidelines:
Take time to carefully check your optic alignment to ensure the laser
beam is traveling parallel to the machine travel.
Watch for irregularities in your linear measurements. If the amount of
error is steadily increasing, you may have significant cosine error.
Allow the temperature of the optics to stabilize before making the
measurement (approximately 5 to 10 minutes).
1
Laser head
2 Interferometer
assembly
3 Retroreflector at the
first measurement
position
4 Displacement along
the axis of
measurement
5 Retroreflector at the
second measurement
position
6 Axis of motion
7 Axis of measurement
8 Actual displacement
0
1
2
3
4
5
6
8
7

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