Chapter 8 Ensuring Repeatability, Accuracy, and Resolution
Improving Resolution
8-14 Getting Started Guide
8
Lost motion, or backlash, is one source of non-repeatability; therefore, you
should pay special attention to this. The lost motion can be seen in the
difference between your forward and reverse means on the Analyze Data
screen. However, certain geometric problems with your machine can give
the appearance of lost motion. Chapter 9, “Troubleshooting and
Maintenance,” lists some causes of excessive lost motion.
Improving Resolution
The resolution of your system depends on the optics you are using and the
size of your sample.
To get the best resolution from your optics, follow these guidelines:
• Be sure to use the optics most appropriate for your measurements.
• Examine the optics to be sure they are clean and in good condition.
• If your measurement requires extra-high resolution, you may need to
use the following optics used with the Agilent 10724A Plane Mirror
Reflector:
– Agilent 10706A,B Plane Mirror optics
– Agilent 10716A High Resolution Plane Mirror optic
The metrology software provides extended resolution by averaging
samples of over 100 points to provide an additional digit of measurement
resolution. You can choose this option on the Set Up Measurement screen.
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