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Agilent Technologies 5530 Getting Started Guide
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*10747-90061*
Manual Part Number 10747-90
061
Printed in U.S.A, OCT
OBER 13,
20
08
149
Table of Contents
Default Chapter
5
Table of Contents
5
1 Introducing the Agilent 5530
13
Introduction
14
Overview of the Agilent 5530
15
System Overview
16
Overview of Laser Calibration
17
Types of Measurements
19
2 Making Laser Measurements Safely
21
Introduction
22
Safety Labeling
22
General Safety Precautions
23
Using the Laser Head Safely
24
Using Components Safely
24
Protecting the Optics
25
3 Installing the Software and Connecting Components
27
Introduction
28
Installing the Metrology Software
28
Computer Requirements
28
Installing the Software
30
To Start the Metrology Software (General)
31
To Exit the Metrology Software (General)
31
Connecting the Axis Module and Sensor Hub
32
Communication Leds
37
Connecting the Sensors
37
Connecting the Laser
40
Agilent 10888A Remote Control Unit
42
Agilent 10887-60202 A-Quad-B Cable Assembly
43
Connecting and Turning on Power
44
4 Using the Agilent 5530 for the First Time
45
Introduction
46
Task 1: Assembling and Connecting Components
47
Task 2: Setting up the Software
50
Task 3: Aligning the Optics
54
Task 4: Making the Measurements
57
Task 5: Displaying and Saving Data
61
Displaying Analysis Data
61
Saving Data
63
Task 6: Exiting the Metrology Software
64
5 Setting up the Software for a Measurement
67
Introduction
68
Terms to Know
70
Conventions Used in the Software
72
Entering Data
72
Using Buttons
73
Using Online Help
73
Accessing the Software
74
Selecting a Measurement Type
76
Recalling Saved Setup Files and Data Files
78
Saving Setup Data and Measurement Data Files
80
Exiting the Metrology Software
82
Setting up the Laser Software for Your Measurement
83
Verifying the Hardware Setup
84
Testing the Remote Control Unit
85
Setting up Environmental Compensation
85
Defining Laser Parameters
86
Resetting the Laser Position
88
Setting up Your Measurement
88
6 Making the Measurement
91
Introduction
92
Mounting the Laser Head on the Tripod
92
Collecting Measurement Data
97
Recording Measurement Data
98
Erasing Measurement Data
99
7 Analyzing, Transferring, and Printing Measurement Data
101
Introduction
102
Displaying the Analyze Data Screen
103
Changing the Data Display
104
Autoscaling
104
Adding Text to Your Graph
104
Displaying and Editing Measurement Data
105
Printing the Data Analysis Graph
107
Transferring Data to Another Program
108
Setting up the Data Analysis Graph
108
Selecting an Industry Standard
109
Entering Machine Information
110
Creating a Compensation Table
111
8 Ensuring Repeatability, Accuracy, and Resolution
113
Introduction
114
Ensuring Accuracy
115
Compensating for Environmental Factors
116
Correcting Errors that Affect Linear Measurements
116
Abbé Error
117
Deadpath Error
118
Cosine Error
119
Correcting Errors that Affect Angular Measurements
121
Correcting Errors that Affect Straightness, Squareness, and Parallelism Measurements
121
Ensuring the Accuracy of Straightness Reflector Mirrors
121
Correcting for Slope
122
Compensating for Environmental Factors
123
Optimizing Repeatability from One Calibration to the Next
125
Improving Resolution
126
9 Troubleshooting and Maintenance
127
Introduction
128
Troubleshooting the Agilent 5530
128
Maintaining the Agilent 5530
130
Maintaining the Optics
130
Cleaning with Lens Tissue and Methanol or Alcohol
130
Cleaning with Pressurized Air
130
Maintaining the Air Sensor
131
Checking Accuracy Quickly
131
Cleaning
131
Maintaining Material Temperature Sensor
132
Technical Support
145
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Reference Guide
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Agilent Technologies 5530 Specifications
General
Brand
Agilent Technologies
Model
5530
Category
Test Equipment
Language
English
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