Contents
vi Getting Started Guide
8 Ensuring Repeatability, Accuracy, and
Resolution
Introduction 8-2
Ensuring Accuracy 8-3
Compensating for environmental factors 4
Correcting errors that affect linear measurements 4
Abbé error 5
Deadpath error 6
Cosine error 7
Correcting errors that affect angular measurements 9
Correcting errors that affect straightness, squareness, and
parallelism measurements 9
Ensuring the accuracy of straightness reflector
mirrors 9
Correcting for slope 10
Compensating for environmental factors 11
Optimizing Repeatability From One Calibration to the
Next 8-13
Improving Resolution 8-14
9 Troubleshooting and Maintenance
Introduction 9-2
Troubleshooting the Agilent 5530 9-2
Maintaining the Agilent 5530 9-4
Maintaining the optics 4
Cleaning with pressurized air 4
Cleaning with lens tissue and methanol or alcohol 4
Maintaining the air sensor 5
Cleaning 5
Checking accuracy quickly 5
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