Often Used Analytical Procedures
M4 TORNADO
147
Table 53 Steps for Area analysis
Step Examples/hints
1
Prepare the sample
2
Move the stage into Eject position and put the
sample to the crosshairs of the stage
3 Move the stage into Load position
4 Start the vacuum pump, if required
5 Select the workspace for Point analysis
6
Move the sample into focal plane with Autofocus,
control if the sample is flat over the line scan area
7 Switch to the workspace for Area analysis
8
Define the area for the map in the image
9
Set the pixel distance or number of pixels in the
workspace Area
10
Set the tube parameters in device area X-ray tube,
set for highest count rate to get a small statistical
error in short measurement time per pixel
11
Set the measurement time and stage mode with
the downward-facing arrow next to Acquire
It is recommended to use short measurement times
per pixel and measure in several cycles to
accumulate distributions with high spatial resolution
12 Start the measurement with Acquire
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