Strasbaugh Software Calibration Procedures
Version 1.2 - April 18, 1996 8 - 11
V191 6500 minimum position coordinate-large
wheel
V193 30 time for measure probe stroke
V194 1200 alarm timeout timer
# V195 3937 conversion constant-acu/micron
V196 70 rinse/scrub time each wafer
V197 200 total rinse/dry time last wafer
V4 -30 maximum wafer thickness in microns
below the programmed target that
machine will compensate spindle
height
V5 30 maximum wafer thickness in microns
above the programmed target that
machine will compensate spindle
height
V619 120 amount of time in minutes between
lubricator cycles
573 OFF set for one wheel initialize
571 OFF keyswitch in program model required
for parameter entry
V306 0 fine wheel accumulator in microns
V307 0 coarse wheel accumulator in microns
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