Operation and Maintenance Manual Model 7AA Wafer Grinder
4 - 6 Version 1.2 - April 18, 1996
An elevator will not service a cassette unless the empty cassette
has been removed and a new cassette replaced. A "cycle halt"
condition will inhibit the send elevators from lowering to the next
occupied slot. The send elevators will resume their normal
operation once a halted cycle has been restarted. Removing a
cassette at any time or aborting an auto cycle will cause the
elevators to raise to their upper travel limit. Each send elevator will
operate only when the other send elevator is at its upper travel
limit.
RECEIVE ELEVATORS AND CONVEYOR
There are two receive elevators on the machine designated
"Receive Elevator #1" (elevator nearest center of machine) and
"Receive Elevator #2" (elevator nearest front of machine). Upon
power-up of the machine, both elevators will raise to their upper
travel limit. Either or both elevator(s) may be loaded with a
cassette which is either completely or partially empty. The
cassettes are serviced in the order that they are placed on the
elevators.
FOR RELIABLE ELEVATOR OPERATION, THE ELEVATORS
AND CONVEYORS MUST BE STOPPED BEFORE THE
OPERATOR DOORS ARE OPENED.
Immediately after placing the first cassette on a receive elevator,
the elevator will begin moving down. The machine control checks
the elevator's wafer sensor every 3/16" to see if a wafer occupies
that slot. If the slot is vacant, the elevator continues down to
examine the next slot. When a wafer is sensed, or when the
elevator passes the last wafer slot, the elevator raises 3/16" to the
first vacant slot. The machine control will then turn on the receive
conveyor after a wafer has been measured and send the wafer to
the vacant slot. Upon sensing the wafer in the cassette, the
conveyor is turned off and the elevator raised 3/16" to the next
vacant slot.
When a receive elevator senses a wafer in slot 1 (the last available
slot) the elevator will raise to its upper travel limit and remain until
the cassette is replaced. The other elevator, if loaded with a
cassette, will then go through the same routine. This cycle will
continue until there are no cassettes in place or the auto cycle is
halted. An elevator will not service a cassette unless the full
cassette has been removed and a new cassette replaced.
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