Strasbaugh Operator Functions
Version 1.2 - April 18, 1996 4 - 7
Halting the auto cycle will cause the elevators to continue their
present function - looking for a wafer or raising to the upper
travel limit - and will stop when completed. Removing a
cassette at any time will cause the elevator to raise to its upper
travel limit. Each receive elevator will operate independently of
the position of the other elevator as long as no wafers are being
loaded. The receive conveyor is inhibited until one elevator is
at its upper limit and the other is at a vacant cassette slot.
PICK AND PLACE ASSEMBLY
The pick and place assembly consists of 3 vacuum chucks
mounted on a three-position rotating spindle. The 3 vacuum
chucks are designated as P & P #1, P & P #2, and P & P #3. In
the fully counterclockwise (ccw) position (as viewed from the top)
the P & P #1 chuck is centered above the wafer pick-up station,
the P & P #2 chuck is centered above the work chuck, and P & P
#3 is centered above the rinse/spin chuck.
The mechanism for controlling the pick and place movement
consists of two air cylinders and four reed switches to monitor its
positions. Each P & P chuck uses vacuum and blow off for pick-up
and removal of wafers, respectively. Vacuum sensors monitor the
P & P chucks for reliable operation. Any pick and place errors will
halt the auto cycle until cleared (see section 2.12).
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