Operation and Maintenance Manual Model 7AA Wafer Grinder
4 - 8 Version 1.2 - April 18, 1996
MACHINE CYCLE SEQUENCE
WITHOUT WAFER TRANSPORT
SYSTEM
The manual version of the 7AA contains identical hardware used
for the wafer grinding operation as the automatic version.
However, the wafer transport system, including send elevators,
centering station, pick and place assembly, rinse/spin station, and
receive elevators is omitted. A measuring station is provided to
maintain the closed loop thickness control feature. Also, an
additional rinse spout is provided for rinsing the wafer manually
after grinding.
Two palm buttons (left and right) are provided for operator control
of the machine. The manual grind cycle sequence is explained
below.
The operator first places the wafer on the ceramic work chuck.
The wafer should be centered as close as possible for a
symmetrical grind pattern. Push the left button to turn on vacuum
at the work chuck.
With the wafer held in place on the work chuck push both buttons
simultaneously to start the grind cycle. The chuck will begin
rotating and move in under the grind wheels to perform the
programmed grind cycle. When the grind cycle is complete the
chuck will return to the home position and continue rotating. The
rinse valve will turn on to rinse the wafer. A brush may be used to
clean the wafer at this time if desired. Push the right button to
stop the chuck rotation and rinse. The ceramic chuck will be
backflushed to "float" the wafer for easy removal.
Push the right button a second time to restart the chuck rotation
and rinse. This allows for rinsing the chuck surface and manually
washing the wafer at the second rinse spout. Push the right button
a third time to stop the rotation and rinse.
When the wafer is placed on the measuring station chuck the
probe will automatically raise to measure the wafer. The
measurement will be displayed on the CRT display and any
required correction will be applied as with the automatic machine.
Pushing the left button will always pull vacuum on the work chuck
to begin another grind cycle.
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