Strasbaugh Operator Functions
Version 1.2 - April 18, 1996 4 - 11
SPECIAL KEY FUNCTIONS
Certain keys are programmed to perform specific functions
depending on the present mode of operation. The special
functions available in each mode are described below:
all modes:
[^] key prompts a thickness measurement
[^] key and [0] key zero measurement probe
[B] key disables audio alarm for two minutes
[DEL] key disables audio alarm until released and
erases error message if error corrected
[R] key stops all machine motion and returns to
machine operation menu
manual jog mode:
[.] key raises and lowers shroud door
[+/-] key turns work chuck vacuum on and off
[ENT] moves wafer from measurement station to active
receive cassette.
chuck grind mode:
[.] key raises and lowers shroud door
[+/-] key turns work chuck vacuum on and off
[ENT] key moves wafer from measurement station to active
receive cassette.
single grind mode:
[START] key starts auto cycle
[STOP] key halts auto cycle
[ENT] key moves wafer from measurement
station to active receive cassette
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