-SCS Pulse Card (PGU and PMU) User's Manual Section 8: Testing
4200A-PMU-900-01 Rev. B March 2023 8-5
Figure 155: Fowler-Nordheim tunneling program and erase
The following figure shows examples of moving charge using HCI. These conditions are examples
with approximate voltage values. The pulse width and pulse height will vary depending on device
structure and process details.
Figure 156: Hot charge injection (HCI) program and erase
The flash projects support two methods for switching between the pulse and measure phases of the
typical flash memory test.
The first is the typical method, using a switching matrix to route the pulse or DC signals to the DUT.
Using the switching matrix is more complicated, but provides flexibility for certain tests and test
structures that use arrays. The second method uses the on-card isolation relays on both the SMUs
and the pulse cards to configure a simpler setup without the external switching matrix.
Because both the SMUs and the pulse cards have isolation relays on the cards, you can configure a
simpler setup without the external switching matrix. The advantage of the simpler setup is lower cost.
However, the switching matrix provides lower current measurement performance and the flexibility
necessary for testing arrays of test structures.
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