8-4 Agilent 4155C/4156C User’s Guide Vol.1, Edition 11
Specifications
Hardware
Hardware
4156C Precision Semiconductor Parameter Analyzer
HRSMU (High Resolution SMU) Specifications
• Current Range, Resolution, and Accuracy: See Table 8-1.
• Voltage Range, Resolution, and Accuracy: See Table 8-3.
• Output terminal/connection
Dual triaxial connectors, Kelvin (remote sensing)
• Voltage/Current Compliance (Limiting)
The SMU can limit output voltage or current to prevent damaging the device
under test.
Voltage 0 V to ± 100 V
Current ± 100 fA to ± 100 mA
Compliance accuracy Same as current (voltage) set accuracy.
• HRSMU supplemental information
Allowable cable resistance maximum 10 Ω (for both Force and Sence. Kelvin
connection.)
Voltage source output
resistance typical 0.2 Ω (Force line. Non-Kelvin connection.)
Voltage measurement input
resistance ≥ 10
15
Ω
Current source output
resistance ≥ 10
15
Ω (10 pA range)
Current compliance setting
accuracy (for opposite polarity)
For10pAto10nArange:
V/I setting accuracy ± 12 % of range
For 100 nA to 100 mA range:
V/I setting accuracy ± 2.5 % of range
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