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Edwards STP-iS1607 Series User Manual

Edwards STP-iS1607 Series
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STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page vi
PAGE
vi
ILLUSTRATIONS
Figure Title Page
1 STP pump installation warning label 5
2 Hot surface warning label 5
3 Heavy product caution label 6
4 High voltage device caution label 6
5 Rotation instruction label 6
6 Cross sectional view of the STP pump 7
7 External appearance of STP-iS1607/iS1607C/iS1607B 17
8 External appearance of STP-iS1607S/iS1607CS/iS1607BS 18
9 Label affixing positions 19
10 Space around the STP pump 23
11 Example of lifting the STP pump 25
12 Example of lifting the STP pump (horizontal positioning) 26
13 Jack-up the STP pump 27
14 Control unit bottom face 27
15 STP pump with eyebolts 28
16 Configuration of the STP pump 29
17 Control unit (Front panel) 31
18 Installation of the STP pump to the vacuum equipment 34
19 STP pump installation positions 36
20 Positions of the outlet port on the horizontally
or slanted installed STP pump 36
21 Bolt position for securing the flange 40
22 Methods of securing the STP pump 41
23 Screw holes for securing the base 42
24 Power cable 43
25 Connecting method of the power cable 44
26 Height of purge port 49
27 Positions of the cooling water port 50
28 Baking heater installation position 51
29 Pump operation method 58
30 "ROTATION" LED Indication 60
31 X2 REMOTE connector 61
32 X2 REMOTE input signal pins (contact input) 63
33 X2 REMOTE output signal pins 68
34 Serial port 71
35 X3 connector (D-Sub9) 72
36 RS485 connections 74
37 Grounding example (Both ends grounding) 78
38 Grounding example (single point grounding) 78
39 Example of ring ferrite core installation 79
40 Example of cable installation in metallic duct 79
41 Example of differential signal waveform 80
42 PC to SIM communication 81
43 Block diagram of communication process example 91
44 Example of answer resending process 92
45 Example of response when the command is sent continuously 92
46 Example of command sending during answer data reply 92
47 Example of communication cycle process 93
48 Example of command sending process 94
49 Example of answer receiving process 94

Table of Contents

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Edwards STP-iS1607 Series Specifications

General IconGeneral
BrandEdwards
ModelSTP-iS1607 Series
CategoryWater Pump
LanguageEnglish

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