Edwards STP-iXA2205 Series - Page 164

STP-iXA2205 Series Turbomolecular Pump
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SAFETY FUNCTIONS
Referred
Section
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Countermeasures
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Probable causes
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Occurrence
condition
3"9-7%+,44A=% ?67?,6:%<;6A,7-%6>% ?">:7"A%,>6:% % X;6A,7-%"<%JFL% ?/-?N%6>%L3Y% W;5;D-%4"6>:% -S?--+%+-::6>D% #;A,-% ]"55,>6?;:6">% <;6A,7-%"<%:/-%6>4,:% "4-7;:6">%4"7:% 8,76>D% ;??-A-7;:6">%;>8% >"75;A%"4-7;:6">% F@>"75;A%7":;:6>;A% +4--8%8-:-?:6">% 1L2%:-54-7;:,7-% ?">:7"A%-77"7% Q9/->%:/-%1L2% ,>6:%8-:-?:6">% :-54-7;:,7-% @-?"5-+%/6D/-7% :/;>%:/-%+-::6>D% #;A,-%@=%&'j]% Qm&[%aXR%"7%5"7-$%
Pump operation
W-?-A-7;:-%;>8% +:"4% W-?-A-7;:-%;>8% +:"4% W-?-A-7;:-%;>8% +:"4% W-?-A-7;:-%;>8% +:"4% % % W-?-A-7;:-%;>8% +:"4% W-?-A-7;:-%;>8% +:"4% %
(Error message)
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"FAILURE"
LED
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