Edwards STP-iXA2205 Series

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STP-iXA2205 Series Turbomolecular Pump

Nov. 10 161 Issue 1-h

MAINTENANCE AND INSPECTION

Back side

(A) Control unit

STP-iXA2205C(V)

Front side Back side

(B) Control unit and power unit

STP-iXA2205CP(V)

Figure 63 - Method for sealing ventilation port

Main Page

Table of Contents3
Introduction11
Scope and Definitions11
Applied Standards12
Limited Warranty12
Warranty Period12
Item Warranted12
Disclaimer13
Spare Parts13
Precautions for Safe Operation of the STP Pump14
Usable Gases14
Maintenance and Inspection Precautions15
Labels15
STP Pump Installation Warning Label15
Hot Surface Warning Label15
Tip over Caution Label16
Heavy Product Caution Label16
High Voltage Device Caution Label16
Water Caution Label17
Rotation Instruction Label17
Operation Principle of the STP Pump18
STP Pump Specification20
Technical Data23
STP Pump Specifications23
Maximum Gas Flow-Rate24
Water Cooling Use Condition24
Control Unit25
Power Unit26
External Appearance of the STP Pump27
External Appearance of STP-Ixa2205C(V): VG250/ISO250F/ICF30527
External Appearance of STP-Ixa2205Cp(V): VG250/ISO250F/ICF30528
External Appearance of STP-Ixa2205Cip: VG250/ISO250F/ICF30529
External Appearance of the Power Unit30
External Appearance of Power Unit Ips-120030
Label Affixing Positions31
Installation of the Stp Pump33
Precautions before Installation33
Operating Environment33
Installation Area35
Bench36
Insulation Test36
Unpacking37
Unpacking the STP Pump37
Example of Lifting the STP Pump37
Eyebolt Size37
Example of Lifting the STP Pump (Horizontal Positioning)38
Name and Function of each Part42
Name and Function of the Pump42
Control Unit (Front Panel)42
Power Unit (Connector Panel)42
Power Unit (Front Panel)42
(STP-Ixa2205C[V])42
(STP-Ixa2205Cp[V]/Cip)42
Pump Functions42
Name and Function of the Control Unit43
Control Unit Front Panel Functions44
Name and Function of the Power Unit45
Power Unit Connector Panel Connection45
Power Unit Front Panel Function46
How to Install the STP Pump47
Cleaning the Seal49
STP Pump Installation Positions50
Positions of the Outlet Port on the Horizontally50
Secure the STP Pump51
Tightening Torque of Bolt51
Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange52
Shape of Reduced Diameter Shank Bolts54
Shape of Reduced Diameter Shank Bolts55
Legs for Securing the Base56
Installation of the Power Unit57
Fixed Screw Hole Potion for the Power Unit57
External Power Supply Unit58
DC Cable for External Power Supply Unit58
DC Cable58
Cable Connection60
DC Cable60
External Appearance of DC Cable (STP-Ixa2205C[V])60
External Appearance of DC Cable (STP-Ixa2205Cp[V]/Cip)60
Power Cable61
How to Connect the Cables63
Precautions of Vacuum Piping65
Vacuum Piping Method65
Connecting the Purge Port66
Connecting the Water Cooling Pipe67
Positions of the Cooling Water Port67
Attaching a Baking Heater68
Installation of the TMS Unit69
3.13.1 Configuration of the STP Pump with the TMS69
Configuration of the TMS (STP-Ixa2205Cpv)70
3.13.2 TMS Heater71
3.13.3 TMS Valve71
3.13.4 Installation of the TMS Unit71
3.13.5 Connecting the TMS Heater Cable71
3.13.6 Connecting the Pump and TMS Valve72
3.13.7 TMS Unit Specification72
Connecting to Semiconductor Equipment73
3.14.1 Connecting to Power73
Emergency off Circuit (EMO Circuit)73
Operation75
Gas Pumping, Cooling and Baking the STP Pump75
Gas Pumping75
How to Introduce a Purge Gas76
Cooling the STP Pump76
Water-Cooling Method76
Baking the STP Pump77
Before Starting the STP Pump78
Confirmation before Starting78
Confirmation of Vacuum System78
Powering on79
Pump Operation79
Input Operation Port Setting79
Starting/Stopping the STP Pump80
Pump Operation Method 1 (Contact Input)80
Pump Operation Method 2 (Contact Input)80
Starting/Stopping the STP Pump Using Contact Input (X2 REMOTE)80
Pump Operation Method 1 (Voltage Input)81
Pump Operation Method 2 (Voltage Input)81
Starting/Stopping the STP Pump Using Voltage Input (X2 REMOTE) (Voltage Input)81
How to Start/Stop the STP Pump82
Starting the STP Pump after Stopping82
Starting the STP Pump after a Safety Function Operates82
Powering off82
Reset Operation (X2 REMOTE)82
Led83
Parallel Port Input/Output Signal84
Input Signal Pins84
X2 REMOTE Connector84
X2 REMOTE Input Signal Pins85
X2 REMOTE Input Signal Pins (Continued)86
X2 REMOTE Input Signal Pins (Contact Input)87
X2 REMOTE Input Signal Pins (Voltage Input)88
X2 REMOTE Input Signal Pins (Voltage Input) (Continued)89
Rotation INHIBIT Signal Input89
X2 REMOTE Input Signal Pins (Voltage Input)90
Input Operation Port Setting91
Input Operation Port91
Rotation INHIBIT Signal92
Output Signal Pins93
X2 REMOTE Output Signal Pins94
X2 REMOTE Output Signal Pins95
Operating the TMS Unit (for Use with the TMS Unit)97
Before Starting97
4.10.2 Starting/Stopping97
4.10.3 Setting the TMS Unit Function97
Serial Communication Protocol99
Introduction99
Serial Port99
Connection and Setting up100
Signal Connection100
Connecting the RS485102
Communication Parameter Setting103
Communication Parameters103
Input Operation Port Setting104
Serial Communication Timeout Setting105
Serial Communication Time out Setting105
Protocol Specifications106
General Description106
Standard Transmission Frame107
Control Command108
(In the RS232/RS485 Single Point Connection)108
Query Command109
(In the RS232/RS485 Single Point Connection)109
Transmission Data Format110
Frame Control (Checksum)111
Error Control111
Transmission Frame in the RS485 Multi-Point Connection111
Control Command in the RS485 Multi-Point Connection113
5.3.10 Query Command in the RS485 Multi-Point Connection114
5.3.11 Broadcasting Command in the RS485 Multi-Point Connection115
Pump Operation Commands115
Command Specifications116
Command List116
Readmeas117
Command117
Readfailmess118
Pump Operation Commands118
Error Message Values121
Readmodfonct122
Readversion124
Readcounters125
Readsetpoint126
Readmotortemp126
5.4.10 Readstatus127
5.4.11 Readevents128
Remote Mode128
5.4.12 Setspeedsetpoint129
5.4.13 Readspeedsetpoint130
5.4.14 Readmodfonctwithwarning131
Pump Operation Mode131
5.4.15 Readmeasvalue134
5.4.16 Readoptionfunc136
5.4.17 Setoptionfunc139
5.4.18 Readcondition141
5.4.19 Readeventswithtime143
Stp-Link and Display Unit147
STP-Link147
WARNING Function147
Display Unit148
Display Unit Idt-001148
Safety Functions149
Power Failure149
Operation after a Power Recovery150
States of Leds and X2 REMOTE Output Signals150
Abnormal State of Magnetic Bearing (Disturbance)151
Excessive Vibration (Disturbance)151
Motor Driver Overload (DRV Overload)151
Overheating Inside the STP Pump (MOTOR Overheat)151
Overheating Inside the Control Unit (CNT Overheat)151
Overspeed152
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)152
WARNING" Function153
WARNING Output154
Contents of WARNING Function155
First Damage Limit155
Second Damage Limit155
Pump Run Time over155
Pump Overload156
Imbalance156
WARNING Function Setting157
Default Setting of WARNING Function157
Factory Setting and Variable Range157
Troubleshooting Immediately after Failure Occurs158
After Power Failure158
After Other Abnormality/Error158
Troubleshooting159
Indication of "FAILURE" LED (Red)159
Failure Output159
Indication of "FAILURE" LED (Green)166
No Indication of the "FAILURE" LED166
Maintenance and Inspection167
Cleaning168
Inspecting the Deposit168
Overhaul169
Transporting for Repair or Overhaul170
Storage and Disposal173
Storage of the STP Pump173
Disposal174
Service, Spares and Accessories175
Introduction175
Service175
Spares175
Accessories176

Edwards STP-iXA2205 Series - Page 171

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