Edwards STP-iXA2205 Series - Page 34

STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% (V% *++,-%&./%
INSTALLATION
)%
D/-%CDE%6,96%+/",38%<-%40+1233-8%40%20%27-2%>/4:/%9--1+%1/-%A"33">40?%7-W,47-9-01+Q%
G9<4-01%1-96-721,7-% '%1"%V'%XM%K)(%1"%&'V%XYL%
G9<4-01%7-3214#-%/,94841;% )'%1"%Z[\%K0"%8->%:"08-0+40?L%
P0#47"09-01%
x%G0%27-2%A7--%"A%-=1-70233;%26634-8%9-:/204:23%+/":B$%
x%G%632:-%A7--%"A%2%/-21%+",7:-%K]--6%:3-27%"A%1/-%/-21%
+",7:-%"7%2112:/%2%1/-7923%+/4-38%6321-L$%
x%G%632:-%A7--%"A%2%+17"0?%92?0-14:%A4-38%KH20?-Q%,6%1"%&[%
9D%K&['%IL%40%1/-%2=423%847-:14"05%208%,6%1"%)%9D%K)'%IL%
40%1/-%728423%847-:14"0%>41/%7-+6-:1%1"%1/-%7"1214"023%2=4+%
"A%1/-%CDE%6,96L$%
x%G%632:-%A7--%"A%2%+17"0?%-3-:174:%A4-38$%
x%G%632:-%A7--%"A%-=6"+,7-%1"%7284214"0$%
x%!"%84+:/27?-%"A%/4?/%#"312?-%K9"7-%1/20%[''%^L%K*A%9"7-%
1/20%[''%^%4+%84+:/27?-85%:"012:1%P8>278+L$%
x%O1/-7+Q%G0%27-2%A7--%"A%-=6"+,7-%1"%847-:1%+,034?/15%/4?/%
/,94841;5%8,+15%+231;%2475%8746640?%>21-75%-=63"+4#-%"7%
A32992<3-%?2+5%:"77"+4#-%?2+5%-=:-++4#-%#4<7214"0%208%
+",7:-+%"A%-3-:174:%0"4+-$%
CDE%6,96%40+1233214"0%
-W,469-01%:"08414"0+%
*0+1233%1/-%CDE%6,96%+-:,7-3;%+"%1/21%A"7-4?0%921-7423+%
:200"1%A233%401"%1/-%CDE%6,96%KP=$Q%C4%>2A-7+%"7%+2963-+%
27-%6"+414"0-8%2<"#-%1/-%CDE%6,96L%KD"%67-#-01%A"7-4?0%
921-7423+%A7"9%A23340?%401"%1/-%CDE%6,965%8-+4?0%2%+/4-38%
6321-%>41/%327?-%:"08,:120:-L$%
_% CDE.4`G(('[M*E%:"9634-+%>41/%E7"1-:14"0%M32++4A4:214"0%*E[V%+-23-8$%D/4+%9"8-3%/2+%67"1-:14"0%2?240+1%8,+1%208%>21-7%
+632+/-8%A7"9%20;%847-:14"0$%H-A-7%1"%*PMa'[(Z.(''&%A"7%8-1243+$%
D2<3-%&%.%P0#47"09-0123%7-W,47-9-01+%A"7%40+1233214"0%