STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% )'% *++,-%&./%
INSTALLATION
)%
JO%!OD%1/-%?746%208%6,33%1/-%JM%:2<3-%KY4?,7-%&ZhGiL%208%A3-=4<3-%/"+-%KY4?,7-%&ZhUiL%A"7%:""340?%
>21-7%>/-0%40+17"3340?%1/-%CDE%6,96$%%
%
%
%
KGL%JM%:2<3-%
KCDE.4`G(('[MEh^idM*EL%
KUL%Y3-=4<3-%/"+-%A"7%:""340?%>21-7%%
KCDE.4`G(('[M*EL%
Y4?,7-%&Z%.%E7"/4<41-8%9211-7%
%
G112:/%1/-%A",7%8-84:21-8%3-?+%1"%632:-%1/-%CDE%6,96%40%,674?/1%6"+414"0%"0%1/-%A3""7$%D/-%CDE%6,96%
94?/1%<-:"9-%,0+12<3-%208%146%"#-7%>41/",1%1/-%3-?+$%K+--%Y4?,7-%('L%
%
Y4?,7-%('%.%CDE%6,96%>41/%8-84:21-8%3-?+%
J-84:21-8%3-?+%A"7%
+120840?%