STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% V)% *++,-%&./
INSTALLATION
)%
D/-%?-0-721-8%8-+17,:14#-%1"7W,-%8-6-08+%"0%1/-%67-+-0:-%"A%2%1"7W,-%7-8,:14"0%9-:/204+9%1/21%
:20%<-%<,431%401"%1/-%A320?-5%2::"7840?%1"%1/-%6,96%9"8-3%208%A320?-%1;6-$%D/4+%9-:/204+95%+/">0%40%
Y4?,7-%)'5%4+%8-+4?0-8%1"%2<+"7<%-0-7?;%208%23+"%<,AA-7%1/-%8-+17,:14#-%1"7W,-$%
D/-7-%27-%1>"%40+1233214"0%9-1/"8+%A"7%1/-%6,965%2+%+/">0%40%Y4?,7-%)&$%@2B-%+,7-%1"%+-:,7-%1/-%
403-1%6"71%A320?-%"A%1/-%6,96%>41/%1/-%7-:"99-08-8%<"31+5%2+%8-+:74<-8%40%Y4?,7-%)&5%2::"7840?%1"%1/-%
40+1233214"0%9-1/"8%,+-8$%
!"1-%1/21%+6-:423%>2+/-7+%>433%<-%7-W,47-8%4A%1/-%6,96%40:3,8-+%1/-%403-1%1"7W,-%7-8,:14"0%9-:/204+9$%
D/-%>2+/-7%+/26-%4+%+/">0%40%Y4?,7-%)'$%
MGND*O!%
%
*0+1233%1/-%A320?-%+-:,740?%<"31+%40%1/-%67"6-7%6"+414"0%>41/%1/-%+6-:423%+W,27-%>2+/-7%+/">0%40%
Y4?,7-%)'$%Y243,7-%1"%8"%+"%92;%:2,+-%2<0"7923%"6-7214"0%"A%1/-%1"7W,-%7-8,:14"0%9-:/204+9%208%
8292?-%1/-%6,96$%
%
MGND*O!%
%
F/-0%20;%401-7023%2<0"792341;d-77"7%7-+,31+%40%/4?/%7"1214"023%1"7W,-5%:2,+40?%1/-%1"7W,-%7-8,:14"0%
9-:/204+9%1"%"6-721-5%1/-%6,96%92;%7"121-%2%92=49,9%"A%[%8-?7--+%27",08%1/-%7"1"7%7"1214"0%21%
2=4+$%
%