Edwards STP-iXA2205 Series - Page 59

STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% VZ% *++,-%&./
INSTALLATION
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Connector X1
pin No
Signal Remarks Outline
&% tZa%^%
Y"7%tZa%^JM%6">-7%
+,663;%
(% '%^G%
Y"7%1/-%?7",08%A"7%JM%
6">-7%+,663;%
)5%V5%[5%a5%f5%g%
㸫%
JO%!OD%:"00-:1%1/-+-%
640+%
Z% YI% Y729-%?7",08%
%
D2<3-%&&%.%E40%2++4?09-01%A"7%:"00-:1"7%`&%
Note: No. 2 pin (0 VA) and No.9 pin (FG) of the connector X1 are connected internally to the pump
body and other metallic components.
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