Edwards STP-iXA2205 Series User Manual

STP-iXA2205 Series Turbomolecular Pump
Nov. 10 iv Issue 1-h
PAGE
iv
CONTENTS (CONTINUED)
Section Title Page
7 SAFETY FUNCTIONS 139
7.1 Safety functions 139
7.1.1 Power Failure 139
7.1.2 Operation after a power recovery 140
7.1.3 Abnormal state of magnetic bearing (Disturbance) 141
7.1.4 Excessive vibration (Disturbance) 141
7.1.5 Motor driver overload (DRV Overload) 141
7.1.6 Overheating inside the STP pump (MOTOR Overheat) 141
7.1.7 Overheating inside the control unit (CNT Overheat) 141
7.1.8 Overspeed 142
7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 142
7.2 "WARNING" function 143
7.2.1 "WARNING" function 143
7.3 Contents of WARNING function 145
7.3.1 First Damage limit 145
7.3.2 Second Damage Limit 145
7.3.3 Pump run time over 145
7.3.4 Pump Overload 146
7.3.5 Imbalance 146
7.4 WARNING function setting 147
7.5 Troubleshooting immediately after failure occurs 148
7.5.1 After power failure 148
7.5.2 After other abnormality/error 148
7.6 Troubleshooting 149
7.6.1 Indication of "FAILURE" LED (red) 149
7.6.2 Indication of "FAILURE" LED (green) 156
7.6.3 No Indication of the "FAILURE" LED 156
8 MAINTENANCE AND INSPECTION 157
8.1 Maintenance and inspection 157
8.2 Cleaning 158
8.3 Inspecting the deposit 158
8.4 Overhaul 159
8.5 Transporting for repair or overhaul 160
9 STORAGE AND DISPOSAL 163
9.1 Storage of the STP pump 163
9.2 Disposal 164
10 SERVICE, SPARES AND ACCESSORIES 165
10.1 Introduction 165
10.2 Service 165
10.3 Spares 165
10.4 Accessories 166

Edwards STP-iXA2205 Series Specifications

General

Brand	Edwards
Model	STP-iXA2205 Series
Category	Water Pump
Language	English