STP-iXA2205 Series Turbomolecular Pump
Nov. 10 vi Issue 1-h
PAGE
vi
ILLUSTRATIONS (CONTINUED)
Figure Title Page
45 Configuration of the TMS (STP-iXA2205CPV) 60
46 TMS valve connection 62
47 Pump operation method 1 (contact input) 70
48 Pump operation method 2 (contact input) 70
49 Pump operation method 1 (voltage input) 71
50 Pump operation method 2 (voltage input) 71
51 "ROTATION" LED Indication 73
52 X2 REMOTE connector 74
53 X2 REMOTE input signal pins (contact input) 77
54 X2 REMOTE input signal pins (voltage input) 80
55 X2 REMOTE output signal pins 85
56 Serial port 89
57 X3/X4 connector (D-Sub9) 91
58 RS485 connections 92
59 PC to SIM communication 96
60 Display unit iDT-001 138
61 WARNING output 144
62 Failure output 149
63 Method for sealing ventilation port 161