Guard should be extended to around the device terminal for reducing leakage current
caused by a coaxial cable used. Guard must be never connected to anything at the
device side.
Circuit Common should be connected to shielding of the coaxial cable used.
The following image is the Kelvin triaxial connector of High Power SMU.
• To Avoid Risk of Residual Charge
This graph shows the load capacitance vs voltage characteristics generally
considered as safety. Use the instrument within the safety area up to 0.1
F or 45 C
according to the voltage. Also do not connect the capacitive load over the maximum
load capacitance specified for the instrument, for example 10 nF for HVSMU and 5 nF
for UHVU.
Before touching the measurement terminal, confirm that it has been discharged
enough. For that, ground and discharge the terminals over 10 seconds after stopping
the high voltage output, and confirm that they have been safety voltage by using
another volt meter.
If abnormal end of measurement, breaking of cable, or device damage occurs, do not
touch the terminals until they are discharged enough.
Also if a series resistor such as N1262A-020, N1262A-021, and N1262A-023 is
connected, do not touch the terminal until it is discharged enough.
Force
Sense
Guard
Circuit Common
Guard
-06
100 1000 10000
Capacitance (
Safety Area
Q=45 MC
C=0.1 MF
(Based on standards IEC60950-1 and IEC61010-1.)
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