page 2 Contents
7 Mounting axes ......................................................................................................................... 31
7.1 Order of the axes and height compensation with spacers .................................................... 31
7.2 Mounting a spacer ................................................................................................................................. 32
7.2.1 Threads for mounting spacers and axes ................................................................................ 32
7.2.2 Replacing an axis with a spacer ................................................................................................. 32
7.3 Mounting axes ........................................................................................................................................ 33
7.3.1 Mounting an x- or y-axis on a spacer ..................................................................................... 34
7.3.2 Mounting a y-axis on an x-axis .................................................................................................. 35
7.3.3 Mounting a z-axis ........................................................................................................................... 36
7.4 Connecting software-controlled axes ............................................................................................ 36
7.5 Mounting a rotating table .................................................................................................................. 38
7.5.1 Removing the x-axis (if present)................................................................................................ 38
7.5.2 Mounting a wafer table ST3220/3270..................................................................................... 40
7.5.3 Mounting a rotating sample table ST3230/3280 ................................................................ 41
7.6 Tilting Table PA3220 ............................................................................................................................. 44
7.6.1 Safety instructions for working with the Tilting Table ...................................................... 44
7.6.2 Weight and dimensions (not mounted) ................................................................................. 45
7.6.3 Mounting the tilting table ........................................................................................................... 45
7.7 PA3240 internal tilting table .............................................................................................................. 47
7.7.1 Overview ............................................................................................................................................. 47
7.7.2 Note ..................................................................................................................................................... 47
7.7.3 Mounting ........................................................................................................................................... 47
7.7.4 Connecting the tilting table ........................................................................................................ 49
7.7.5 Centring the tilting table in the optical axis.......................................................................... 49
7.7.6 Levelling the tilting table ............................................................................................................. 50
7.7.7 Adjusting the height of the sample stage ............................................................................. 51
7.7.8 Fitting the holding clamps ........................................................................................................... 52
7.7.9 Fitting spacers for the protective glass ................................................................................... 52
7.7.10 Mounting the ST13 miniature sample table (optional) .................................................... 53
8 Manual single-dosing unit DS3200/3201 .................................................................... 55
8.1 Fitting a disposable syringe ............................................................................................................... 55
8.2 Assembling the dosing unit to the DSA100................................................................................. 56
8.3 Adjusting the dosing unit ................................................................................................................... 57
9 Software-controlled single-Dosing unit DS3210 ...................................................... 58
9.1 Mounting the dosing unit ................................................................................................................... 58
9.2 Fitting the syringe .................................................................................................................................. 59
9.3 Adjusting the dosing unit ................................................................................................................... 60