NT-MDT Solver Next - Heads; Technical Specification

Chapter 1. Overview
9
1.4. Technical Specification
Measuring system
Built-in measuring heads AFM, STM
Mountable measuring heads liquid, nanosclerometric
System for detecting the cantilever
deflection
automated alignment
Laser wavelength of cantilever
deflection system
850 nm
Sample
Size up to ø20×10 mm
Positioning range, in XY plane 5×5 mm
Positioning method automated with the use of optical image
Minimum positioning step
0.3
μ
m
Sample weight up to 40 g
Heating capabilities
(heating stage)
up to 150 °C
Scanning system
Scanning mode by sample
Scan area
100×100×10
μ
m (±10 %)
3×3×2.6 μm (±10 %)
(in the high resolution mode)
Relative error of distance
measurement:
XY plane
Z direction
less 1 % (less 0.1 % with the use of the feedback
sensors)
less 5 %
Non-linearity, in XY plane (with the
use of feedback sensors)
less 0.1 %
RMS noise in 1 ÷ 200 Hz frequency
range, XY plane
less 0.02 nm (XY 100
μ
m)
less 0.001 nm (XY 3 μm)
RMS noise in 10 ÷ 1000 Hz frequency
range, Z direction:
with the use of the feedback sensors
in the high resolution mode
less 0.04 nm
less 0.02 nm