Chapter 8. Lithography
169
8.2.1. Preparation for Operation
Basic preparatory operations are:
1. Estimation of the Probe Pressure on the Sample (see i. 8.2.1.1 on p. 169);
2. Preliminary Scanning and Selecting Lithography Region (see i. 8.2.1.2 on p. 172).
These operations are explained in details below.
8.2.1.1. Estimation of the Probe Pressure on the Sample
In lithographic experiments, it is often critical to know the pressure which the probe
applies to the sample. To estimate the pressure corresponding to a specified level of the
probe impact, the force created by the probe has to be determined first. It can be calculated
from force spectroscopy data. The only requirement here is that the sample has a rigid
surface to avoid punching.
Acquire DFL(Height) spectroscopy data at a point. To this purpose, perform the following
steps:
1. In the controller configuration drop-down list of the Nova P9 program, select Contact
(Fig. 8-6).
Fig. 8-6. Selecting the controller configuration
2. Close the feedback loop (the button will change its appearance to
On).
3. Open the SpectroForm window by clicking the button in the Main
Operations panel (Fig. 8-7).
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